Major Emphases
It offers research and development facilities and services with the following major emphases – in conjunction with the Center for Microtechnologies at Chemnitz University of Technology:
- systems integration
- developing silicon-based micro and nano systems and new sensor and actuator technologies (Examples are miniaturized spectrometer, inclination sensors, highprecision acceleration sensors and gyroscopes) based on polymers
- the reliability and safety of components and systems
- printed functions
- System packaging (Technology development for bonding chip to wafer or wafer to wafer, thin film encapsulation)
- Back end of Line (interconnect system within microelectronic components)
