| 11.09.2006 | foundation stone laid for the physics building at the Chemnitz University of Technology |
| November 2006 | positiv decision on subsidies for the start-up building |
| city council decision to set up TechnoPark GmbH |
| From May 2007 | regional, national and international marketing |
| 16.05.2007 | topping-out ceremony for the physics building at Chemnitz University of Technology |
| October 2007 | start on construction work for Fraunhofer IZM building (since July 2008 Fraunhofer Research Institution for Electronic Nano Systems) |
| 05.11.2007 | laying the foundation stone for the Fraunhofer Research Institution for Electronic Nano Systems ENAS building |
| Beginning of December 2007 | start on construction work for start-up building |
| December 2007 | completion of the physics building |
| January 2008 | laying the foundation stone for the start-up building |
| development of the start-up building |
| January 2009 | handing over of keys and tenants move into start-up building |
| April 2009 | handing over of keys and tenants move into Fraunhofer Research Institution for Electronic Nano Systems ENAS building |
| 19.06.2009 | official opening of the start-up building and the new company building of 3D-Micromac AG |
| 22.06.2009 | official opening of the Fraunhofer ENAS building |
